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DUV Projection Lens
Hyperion recently completed the design and fabrication of an advanced DUV
projection lens for 308 nm laser projection.
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80m field (largest field ever for a UV laser source) |
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Native resolution of 3.0 mm L/S over this 80mm field |
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Resolution of 2.5 mm L/S using enhanced illumination |
The lens was built by our strategic partner CVI-Melles, based on a Hyperion
proprietary optical and mechanical design. |
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