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Excimer Laser Optics
Hyperion has developed numerous beam delivery systems for industrial
Excimer laser applications. Our illumination designs have used fly
eye arrays and other specialty components to provide uniform
illumination at the mask plane. We also design reduction lenses
and match them to our illuminators.
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Beam homogenization using fly eye lens arrays |
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End to end beam delivery simulations |
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Lens design for excimer laser reduction lenses |
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Beam delivery optics - industrial & semiconductor |
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